Scanning Electron Microscope 

Magnification & Imaging

  • Magnification:
    • On Photo: 10× to 100,000×
    • On Display: 25× to 250,000×
  • Signal Selection:
    • 5kV / 10kV / 15kV / 20kV* for BSE, SE, and MIX modes
  • Vacuum Modes:
    • BSE Mode: Conductor / Standard / Charge-up Reduction
    • SE Mode: Standard / Charge-up Reduction
    • MIX Mode: Standard / Charge-up Reduction
  • Observation Modes:
    • BSE Image: Normal, Shadow 1, Shadow 2, TOPO
    • SE Image
    • MIX Image: BSE + SE

Sample Handling & Stage Movement

  • Motorized Sample Stage Travel:
    • X-axis: ±40.0 mm
    • Y-axis: ±35.0 mm
  • Maximum Sample Size:
    • Diameter: Up to 80 mm
    • Height: Up to 50 mm (WD = 6.0 mm)

Electron Gun & Detection System

SE Detector: High-sensitivity low-vacuum SE detector / Ultra Variable Pressure Detector (UVD)

Electron Gun: Pre-centered cartridge filament

Signal Detection System:

BSE Detector: High-sensitive quad-segment semiconductor detector

SE Detector: High-sensitivity low-vacuum SE detector / Ultra Variable Pressure Detector (UVD)

Image & Data Management

  • Frame Memory:
    • 640 × 480 px
    • 1,280 × 960 px
    • 2,560 × 1,920 px
  • Image Data Storage:
    • HDD of PC and other removable media
  • Image Formats: BMP, TIFF, JPEG

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